Buckling propagation of thin films on elastic substrates under alternating load

Author

Wei He ; Shibin Wang ; Diqiang Cui ; Haikun Jia ; Linan Li

Author_Institution

Dept. of Mech., Tianjin Univ., Tianjin, China

fYear

2012

fDate

Aug. 29 2012-Sept. 1 2012

Firstpage

360

Lastpage

364

Abstract

Thin metal films deposited on elastic substrates are widely used as electrodes and interconnects in Micro-Electro-Mechanical Systems (MEMS) and their fatigue property needs to be sufficiently understood. In this paper, the buckling propagation of nano-thin film relying on a substrate under alternating load has been experimentally studied. The effect of loading condition on buckling propagation is discussed in terms of the frequency, film thickness and number of cycles. In particular, buckling growth rate has been analyzed by means of digital image processing technology. Moreover, two kinds of samples have been designed to compare the influence of different materials.

Keywords

aluminium; buckling; copper; fatigue; image processing; metallic thin films; nanofabrication; nanostructured materials; Al; Cu; MEMS; buckling growth rate; buckling propagation; digital image processing technology; elastic substrates; electrodes; fatigue property; microelectromechanical systems; nanothin metal films; Digital images; Fatigue; Films; Loading; Metals; Substrates; buckling propagation; fatigue; image processing; thin flims;

fLanguage

English

Publisher

ieee

Conference_Titel

Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2012 International Conference on

Conference_Location

Shaanxi

Print_ISBN

978-1-4673-4588-0

Electronic_ISBN

978-1-4673-4589-7

Type

conf

DOI

10.1109/3M-NANO.2012.6472976

Filename

6472976