DocumentCode
600081
Title
Determination of two-dimensional phase shifts in three-beam laser interference patterns
Author
Yinbao Lei ; Zuobin Wang ; Jia Xu ; Jinjin Zhang ; Dapeng Wang ; Yu Hou ; Yong Yue ; Dayou Li
Author_Institution
JR3CN & CNM, Changchun Univ. of Sci. & Technol., Changchun, China
fYear
2012
fDate
Aug. 29 2012-Sept. 1 2012
Firstpage
9
Lastpage
13
Abstract
This paper describes a method of determining two-dimensional phase shifts. In this method, the two-dimensional phase shift is divided into horizontal and vertical components, and each component of the phase shift is determined by pattern correlation, Pythagorean theorem and linear interpolation with subpixel accuracy. The computer simulation and experiment have shown that the method is useful for the determination of phase difference between two three-beam interference patterns. The method can also be used to determine the phase shift in other multi-beam interference patterns.
Keywords
interpolation; light interference; photolithography; 2D phase shift determination; Pythagorean theorem; computer simulation; horizontal component; linear interpolation; multibeam interference patterns; pattern correlation; phase difference determination; phase shift component; three-beam laser interference patterns; vertical component; Accuracy; Interference; Laser beams; Laser theory; Lithography; Mirrors; Optical beams; Laser interference lithography; correlation coefficient; two-dimensional phase shift;
fLanguage
English
Publisher
ieee
Conference_Titel
Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2012 International Conference on
Conference_Location
Shaanxi
Print_ISBN
978-1-4673-4588-0
Electronic_ISBN
978-1-4673-4589-7
Type
conf
DOI
10.1109/3M-NANO.2012.6473001
Filename
6473001
Link To Document