• DocumentCode
    600081
  • Title

    Determination of two-dimensional phase shifts in three-beam laser interference patterns

  • Author

    Yinbao Lei ; Zuobin Wang ; Jia Xu ; Jinjin Zhang ; Dapeng Wang ; Yu Hou ; Yong Yue ; Dayou Li

  • Author_Institution
    JR3CN & CNM, Changchun Univ. of Sci. & Technol., Changchun, China
  • fYear
    2012
  • fDate
    Aug. 29 2012-Sept. 1 2012
  • Firstpage
    9
  • Lastpage
    13
  • Abstract
    This paper describes a method of determining two-dimensional phase shifts. In this method, the two-dimensional phase shift is divided into horizontal and vertical components, and each component of the phase shift is determined by pattern correlation, Pythagorean theorem and linear interpolation with subpixel accuracy. The computer simulation and experiment have shown that the method is useful for the determination of phase difference between two three-beam interference patterns. The method can also be used to determine the phase shift in other multi-beam interference patterns.
  • Keywords
    interpolation; light interference; photolithography; 2D phase shift determination; Pythagorean theorem; computer simulation; horizontal component; linear interpolation; multibeam interference patterns; pattern correlation; phase difference determination; phase shift component; three-beam laser interference patterns; vertical component; Accuracy; Interference; Laser beams; Laser theory; Lithography; Mirrors; Optical beams; Laser interference lithography; correlation coefficient; two-dimensional phase shift;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2012 International Conference on
  • Conference_Location
    Shaanxi
  • Print_ISBN
    978-1-4673-4588-0
  • Electronic_ISBN
    978-1-4673-4589-7
  • Type

    conf

  • DOI
    10.1109/3M-NANO.2012.6473001
  • Filename
    6473001