Dense Plasmas in Magnetic Traps: Generation of Focused Ion Beams With Controlled Ion-to-Neutral Flux Ratios

Author

Baranov, Oleg ; Xiaoxia Zhong ; Jinghua Fang ; Kumar, Sudhakar ; Shuyan Xu ; Cvelbar, Uros ; Mariotti, Davide ; Ostrikov, K.

Author_Institution

Plasma Lab., Nat. Aerosp. Univ. “KhAI", Kharkov, Ukraine

Volume

42

Issue

10

fYear

2014

fDate

Oct. 2014

Firstpage

2518

Lastpage

2519

Abstract

Customized magnetic traps were developed to produce a domain of dense plasmas with a narrow ion beam directed to a particular area of the processed substrate. A planar magnetron coupled with an arc discharge source created the magnetic traps to confine the plasma electrons and generate the ion beam with the controlled ratio of ion-to-neutral fluxes. Images of the plasma jet patterns and numerical vizualizations help explaining the observed phenomena.

Keywords

arcs (electric); high-frequency discharges; ion beams; ion sources; magnetic traps; plasma diagnostics; plasma jets; plasma sources; arc discharge source; dense plasmas; focused ion beam generation; ion-to-neutral flux ratios; magnetic traps; numerical vizualizations; planar magnetron; plasma electron confinement; plasma jet patterns; Discharges (electric); Electron traps; Ion beams; Magnetic domains; Magnetic flux; Plasmas; Substrates; Arc discharge; ion beam; magnetic traps; magnetic traps.;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/TPS.2013.2295626

Filename

6712165