Title :
A compact and CMOS compatible MMI coupler with very low excess loss
Author :
Zhen Sheng ; Zhiqi Wang ; Chao Qiu ; Le Li ; Pang, Ai-Chun ; Aimin Wu ; Xi Wang ; Shichang Zou ; Fuwan Gan
Author_Institution :
State Key Lab. of Functional Mater. for Inf., Shanghai Inst. of Microsyst. & Inf. Technol., Shanghai, China
Abstract :
We present the design, fabrication and measurement of a compact multimode interference (MMI) coupler based on silicon nanowire waveguides. The fabricated device has very low excess loss of 0.06dB and a broad operation bandwidth.
Keywords :
CMOS integrated circuits; interference; nanowires; waveguide couplers; CMOS compatible MMI coupler; MMI; broad operation bandwidth; compact multimode interference; fabricated device; silicon nanowire waveguides; very low excess loss; CMOS integrated circuits; Couplers; Loss measurement; Optical device fabrication; Optical waveguides; Silicon; Wavelength measurement;
Conference_Titel :
Optical Fiber Communication Conference and Exposition and the National Fiber Optic Engineers Conference (OFC/NFOEC), 2013
Conference_Location :
Anaheim, CA
Print_ISBN :
978-1-4799-0457-0
