Towards athermal nanoplasmonic resonators based on Cu-Tio2-Si hybrid plasmonic waveguide

Author

Shiyang Zhu ; Lo, G.Q. ; Jielin Xie ; Kwong, D.L.

Author_Institution

Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore

fYear

2013

fDate

17-21 March 2013

Firstpage

1

Lastpage

3

Abstract

Owing to the negative thermo-optic coefficient (TOC) of titanium dioxide, the real effective modal index of Cu-TiO₂-Si hybrid plasmonic waveguides can be potentially temperature independent. High-performance Cu-TiO₂-Si waveguide-ring resonators (WRRs) are experimentally demonstrated on SOI platform using standard CMOS technology. TOC of the group index is measured to be ~1.09×10^-4 K^-1 for a WRR with 220-nm-high Si core and 58-nm-thick TiO₂. TOC of the as-deposited TiO₂ is estimated to ~ -1.0×10^-4 K^-1.

Keywords

CMOS integrated circuits; copper; elemental semiconductors; integrated optoelectronics; nanophotonics; optical resonators; optical waveguides; plasmonics; silicon; silicon-on-insulator; thermo-optical effects; titanium compounds; Cu-Ti_O2-Si; SOI platform; Si; Si core; TOC; WRR; athermal nanoplasmonic resonators; group index; high-performance waveguide-ring resonators; hybrid plasmonic waveguide; negative thermooptic coefficient; real effective modal index; size 220 nm; size 58 nm; standard CMOS technology; temperature independence; titanium dioxide; Indexes; Optical films; Optical resonators; Optical waveguides; Plasmons; Silicon; Temperature measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical Fiber Communication Conference and Exposition and the National Fiber Optic Engineers Conference (OFC/NFOEC), 2013

Conference_Location

Anaheim, CA

Print_ISBN

978-1-4799-0457-0

Type

conf

Filename

6533153