DocumentCode
609359
Title
Effect of different proof mass supports on accelerometer sensitivity
Author
Singh, Prashant ; Srivastava, Prashant ; Chaudhary, Raghvendra Kumar ; Gupta, Puneet
Author_Institution
Dept. of Microelectron., Indian Inst. of Inf. Technol., Allahabad, India
fYear
2013
fDate
10-12 April 2013
Firstpage
896
Lastpage
900
Abstract
The present paper deals with the effect of folded beam and spring support incorporated to the proof mass on comb displacement and sensitivity. The study is made for folded beam and spring type support. All the experiments are carried out on COMSOL Multiphysics 4.3 simulation tool.
Keywords
accelerometers; sensitivity; COMSOL multiphysics 4.3 simulation tool; accelerometer sensitivity; comb displacement; comb sensitivity; folded beam; proof mass; spring type support; Accelerometers; Capacitance; Fingers; Force; Resonant frequency; Sensors; Springs; MEMS; capacitive sensing; in-plane sensing; interdigited fingers; out-of-plane sensing;
fLanguage
English
Publisher
ieee
Conference_Titel
Energy Efficient Technologies for Sustainability (ICEETS), 2013 International Conference on
Conference_Location
Nagercoil
Print_ISBN
978-1-4673-6149-1
Type
conf
DOI
10.1109/ICEETS.2013.6533506
Filename
6533506
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