Title :
Design and modeling of MEMS capacitive gyroscope
Author :
Singh, Prashant ; Gupta, Puneet ; Srivastava, Prashant ; Chaudhary, Raghvendra Kumar
Author_Institution :
Dept. of Microelectron., Indian Inst. of Inf. Technol., Allahabad, India
Abstract :
The present papers deals with the designing of MEMS gyroscope for high driving resonance frequency and to study the effects of various structural parameters on the device performance. The design is based on comb capacitor configuration, which is excited by electrostatic force, sensing is based on transverse axis movement and is designed with 2μm thick polycrystalline silicon layer. The device is modeled for single DOF in accordance with standard SOI-MUMP´s technology using MEMS Pro v5.1 simulation tool.
Keywords :
gyroscopes; microsensors; MEMS Pro v5.1 simulation tool; MEMS capacitive gyroscope design; Si; comb capacitor configuration; device performance; electrostatic force; high driving resonance frequency; polycrystalline silicon layer; sensing; single DOF; size 2 mum; standard SOI-MUMP technology; structural parameters; transverse axis movement; Fingers; Force; Gyroscopes; Micromechanical devices; Resonant frequency; Robot sensing systems; Comb structure; Inertial sensor; coriolis force; driving resonance frequency;
Conference_Titel :
Energy Efficient Technologies for Sustainability (ICEETS), 2013 International Conference on
Conference_Location :
Nagercoil
Print_ISBN :
978-1-4673-6149-1
DOI :
10.1109/ICEETS.2013.6533508
