Design and modeling of MEMS capacitive gyroscope

Author

Singh, Prashant ; Gupta, Puneet ; Srivastava, Prashant ; Chaudhary, Raghvendra Kumar

Author_Institution

Dept. of Microelectron., Indian Inst. of Inf. Technol., Allahabad, India

fYear

2013

fDate

10-12 April 2013

Firstpage

907

Lastpage

911

Abstract

The present papers deals with the designing of MEMS gyroscope for high driving resonance frequency and to study the effects of various structural parameters on the device performance. The design is based on comb capacitor configuration, which is excited by electrostatic force, sensing is based on transverse axis movement and is designed with 2μm thick polycrystalline silicon layer. The device is modeled for single DOF in accordance with standard SOI-MUMP´s technology using MEMS Pro v5.1 simulation tool.

Keywords

gyroscopes; microsensors; MEMS Pro v5.1 simulation tool; MEMS capacitive gyroscope design; Si; comb capacitor configuration; device performance; electrostatic force; high driving resonance frequency; polycrystalline silicon layer; sensing; single DOF; size 2 mum; standard SOI-MUMP technology; structural parameters; transverse axis movement; Fingers; Force; Gyroscopes; Micromechanical devices; Resonant frequency; Robot sensing systems; Comb structure; Inertial sensor; coriolis force; driving resonance frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Energy Efficient Technologies for Sustainability (ICEETS), 2013 International Conference on

Conference_Location

Nagercoil

Print_ISBN

978-1-4673-6149-1

Type

conf

DOI

10.1109/ICEETS.2013.6533508

Filename

6533508