Performance comparison of commonly used MEMS springs: Double-folded, U-shaped and fish-hook

Author

Radwan, Abdulaziz N. ; Almikhlafi, Ridha S. ; Soliman, M.S.M.

Author_Institution

Nat. Center for Electron., Commun. & Photonics (ECP), King Abdulaziz City for Sci. & Technol. (KACST), Riyadh, Saudi Arabia

fYear

2013

fDate

27-30 April 2013

Firstpage

1

Lastpage

6

Abstract

This paper presents a performance comparison of three commonly-used MEMS springs: Double-folded, U-shaped and fish-hook, which are attached each to a same-size proof-mass constituting a mass-spring resonating system oscillating in-plane at 10 kHz. ANSYS Finite Element Analysis (FEA) is performed in order to compare the modal and static analysis among the springs. The effect of fabrication imperfection is also included in the comparison. It is found out that the analyzed Double Folded Beam (DFB) spring demonstrated strongest immunity of about 1% frequency deviation to MEMS fabrication imperfections and against off-axis errors.

Keywords

finite element analysis; micromechanical resonators; springs (mechanical); ANSYS; MEMS fabrication imperfections; MEMS springs; double folded beam spring; finite element analysis; frequency 10 kHz; mass-spring resonating system; modal analysis; off-axis errors; static analysis; Fabrication; Finite element analysis; Force; Micromechanical devices; Resonant frequency; Springs; Stress; SOI-MUMPs; cross-axis coupling; over-etching; spring stiffness; stress fracture; under-etching;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronics, Communications and Photonics Conference (SIECPC), 2013 Saudi International

Conference_Location

Fira

Print_ISBN

978-1-4673-6196-5

Electronic_ISBN

978-1-4673-6194-1

Type

conf

DOI

10.1109/SIECPC.2013.6550993

Filename

6550993