DocumentCode
614485
Title
Improvement of piezoceramic scanners
Author
Sharapov, V.M. ; Filimonov, S.A. ; Sotula, Zh.V. ; Bazilo, K.V. ; Kunitskaya, L.G. ; Zaika, V.M.
Author_Institution
Cherkasy State Technol. Univ., Cherkasy, Ukraine
fYear
2013
fDate
16-19 April 2013
Firstpage
144
Lastpage
146
Abstract
The article is devoted to the problems of piezoscanners. The analysis of existent domestic and foreign constructions of piezoscanners is conducted. The design of the piezoceramic scanner on the basis of flat bimorph piezoelements of a trapezial form for scanning probe microscopes is offered and investigated. Built and probed model of this scanners through the package of the program Femlab 3.5.
Keywords
piezoceramics; scanning probe microscopy; flat bimorph piezoelements; piezoceramic scanner improvement; program Femlab 3.5; scanning probe microscopes; trapezial form; Fluctuations; Materials; Metals; Probes; Resistance; Scanning probe microscopy; Sensitivity; nanotechnology; piezoceramic scanner; scanning probe microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics and Nanotechnology (ELNANO), 2013 IEEE XXXIII International Scientific Conference
Conference_Location
Kiev
Print_ISBN
978-1-4673-4669-6
Type
conf
DOI
10.1109/ELNANO.2013.6552063
Filename
6552063
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