• DocumentCode
    615007
  • Title

    Inter-layer grating coupler on double-layer silicon nanomembranes

  • Author

    Yang Zhang ; Kwong, David ; Xiaochuan Xu ; Hosseini, Amir ; Yang, S.Y. ; Rogers, John A. ; Chen, Ray T.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Univ. of Texas at Austin, Austin, TX, USA
  • fYear
    2013
  • fDate
    5-8 May 2013
  • Firstpage
    35
  • Lastpage
    36
  • Abstract
    We present an adhesive bonding process to fabricate on-chip, double-layer, single crystalline silicon nanomembranes. Inter-layer coupling efficiency of 25% with 35 nm 3dB bandwidth is demonstrated using subwavelength nanostructure based grating couplers.
  • Keywords
    adhesive bonding; diffraction gratings; elemental semiconductors; integrated optoelectronics; membranes; nanofabrication; nanophotonics; nanostructured materials; optical couplers; optical fabrication; silicon; Si; adhesive bonding; efficiency 25 percent; interlayer coupling efficiency; interlayer grating coupler; on-chip double-layer single crystalline silicon nanomembranes; subwavelength nanostructure; Amorphous silicon; Couplers; Couplings; Gratings; Optical waveguides; Inter-layer grating coupler; silicon nanomembrane; subwavelength nanostructure;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Interconnects Conference, 2013 IEEE
  • Conference_Location
    Santa Fe, NM
  • Print_ISBN
    978-1-4673-5061-7
  • Electronic_ISBN
    978-1-4673-5062-4
  • Type

    conf

  • DOI
    10.1109/OIC.2013.6552911
  • Filename
    6552911
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=615007