• DocumentCode
    615045
  • Title

    Integration of silicon photonics in a bulk CMOS memory flow

  • Author

    Meade, Roy ; Tehar-Zahav, Ofer ; Sternberg, Zvi ; Megged, Efraim ; Sandhu, Gurtej ; Orcutt, Jason S. ; Ram, Rajeev ; Stojanovic, V. ; Watts, Michael R. ; Timurdogan, Erman ; Shainline, Jeffrey ; Popovic, M.

  • Author_Institution
    Process R&D, Micron Technol., Inc., Boise, ID, USA
  • fYear
    2013
  • fDate
    5-8 May 2013
  • Firstpage
    114
  • Lastpage
    115
  • Abstract
    Monolithically integrated silicon photonic (SiP) devices have been demonstrated using a modified bulk CMOS flow. Integration was achieved by nominally extending existing process and design collateral without shifting the CMOS parameterization.
  • Keywords
    CMOS memory circuits; elemental semiconductors; integrated optoelectronics; monolithic integrated circuits; optical interconnections; silicon; CMOS parameterization; Si; bulk CMOS memory flow; monolithically integrated silicon photonic devices; silicon photonics; Adaptive optics; Attenuation; CMOS integrated circuits; Optical device fabrication; Optical interconnections; Optical waveguides; Random access memory; bulk CMOS; optical interconnections;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Interconnects Conference, 2013 IEEE
  • Conference_Location
    Santa Fe, NM
  • Print_ISBN
    978-1-4673-5061-7
  • Electronic_ISBN
    978-1-4673-5062-4
  • Type

    conf

  • DOI
    10.1109/OIC.2013.6552950
  • Filename
    6552950
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=615045