Title :
RF-MEMS switch design optimization for long-term reliability
Author :
Mulloni, V. ; Solazzi, Francesco ; Resta, Giovanni ; Giacomozzi, Flavio ; Margesin, Benno
Author_Institution :
Fondazione B. Kessler (FBK-CMM), Trento, Italy
Abstract :
This contribution presents an optimization strategy for the mechanical and geometrical characteristics of clamped-clamped RF-MEMS switches in order to enhance their reliability performances both in terms of switch properties control and long-term stress actuation tests. Experimental measurements demonstrated that the optimized version of the capacitive switch investigated shows an improved resistance to high bias voltage, while the optimized ohmic switch shows a lower and more reproducible contact resistance.
Keywords :
contact resistance; microswitches; optimisation; reliability; capacitive switch; clamped-clamped RF-MEMS switches; contact resistance; geometrical characteristics; long-term reliability; long-term stress actuation tests; mechanical characteristics; ohmic switch; optimization; switch properties control; Contacts; Electrical resistance measurement; Force; Gold; Stress; Switches; Voltage measurement; RF-switch; long-term measurements; reliability;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2013 Symposium on
Conference_Location :
Barcelona
Print_ISBN :
978-1-4673-4477-7
