DocumentCode
618667
Title
Self-test and self-calibration of a MEMS convective accelerometer
Author
Rekik, A.A. ; Azais, F. ; Mailly, Frederick ; Nouet, Pascal ; Masmoudi, Malek
Author_Institution
Microelectron. Dept., Univ. Montpellier 2, Montpellier, France
fYear
2013
fDate
16-18 April 2013
Firstpage
1
Lastpage
4
Abstract
This paper presents an investigation of two integrated solutions that make a previously developed electrical-only test and calibration procedure, of a MEMS convective accelerometer, realizable on-chip. The idea is to integrate on-chip circuitry that performs all required measurements and evaluates an electrical test parameter on which the test and calibration procedure is based.
Keywords
accelerometers; calibration; integrated circuit design; integrated circuit measurement; integrated circuit testing; microsensors; MEMS convective accelerometer; electrical-only test parameter; integrate on-chip circuitry; self-calibration procedure; self-testing; Accelerometers; Bridge circuits; Calibration; Heating; Micromechanical devices; Resistance; Sensitivity; Convective Accelerometer; Design for Test; MEMS;
fLanguage
English
Publisher
ieee
Conference_Titel
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2013 Symposium on
Conference_Location
Barcelona
Print_ISBN
978-1-4673-4477-7
Type
conf
Filename
6559452
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