Title :
Self-test and self-calibration of a MEMS convective accelerometer
Author :
Rekik, A.A. ; Azais, F. ; Mailly, Frederick ; Nouet, Pascal ; Masmoudi, Malek
Author_Institution :
Microelectron. Dept., Univ. Montpellier 2, Montpellier, France
Abstract :
This paper presents an investigation of two integrated solutions that make a previously developed electrical-only test and calibration procedure, of a MEMS convective accelerometer, realizable on-chip. The idea is to integrate on-chip circuitry that performs all required measurements and evaluates an electrical test parameter on which the test and calibration procedure is based.
Keywords :
accelerometers; calibration; integrated circuit design; integrated circuit measurement; integrated circuit testing; microsensors; MEMS convective accelerometer; electrical-only test parameter; integrate on-chip circuitry; self-calibration procedure; self-testing; Accelerometers; Bridge circuits; Calibration; Heating; Micromechanical devices; Resistance; Sensitivity; Convective Accelerometer; Design for Test; MEMS;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2013 Symposium on
Conference_Location :
Barcelona
Print_ISBN :
978-1-4673-4477-7
