• DocumentCode
    61871
  • Title

    Effect of GaN Channel Layer Thickness on DC and RF Performance of GaN HEMTs With Composite AlGaN/GaN Buffer

  • Author

    Xinhua Wang ; Sen Huang ; Yingkui Zheng ; Ke Wei ; Xiaojuan Chen ; Haoxiang Zhang ; Xinyu Liu

  • Author_Institution
    Key Lab. of Microelectron. Device & Integrated Technol., Inst. of Microelectron., Beijing, China
  • Volume
    61
  • Issue
    5
  • fYear
    2014
  • fDate
    May-14
  • Firstpage
    1341
  • Lastpage
    1346
  • Abstract
    The effects of GaN channel layer thickness on dc and RF performance of AlGaN/GaN high-electron mobility transistors (HEMTs) with a state-of-the-art composite AlGaN/GaN (1/1 μm) buffer were systematically investigated. Although HEMTs with a thick GaN channel layer exhibit slight degraded dc and RF small-signal performance associated with short-channel effects, they demonstrate significantly enhanced OFF-state breakdown voltage and RF large-signal performance. The 1-mm HEMTs with a 150-nm-thick GaN channel layer feature a 1.4 dB higher saturated POUT and about 10% higher PAE than that with a 50-nm-thick GaN channel layer, in both Classes AB and B operation conditions. Pulse I-V characterization reveals that the buffer-related current collapse is also suppressed in the thick GaN channel sample as compared with the thin one, suggesting that a thick GaN channel layer will not only reduces the deep traps in the channel, but also reduces the electron capture probability by deep traps in the composite AlGaN/GaN buffer. The selection of a proper GaN channel layer thickness is thus of great importance to the designation of GaN-based power amplifiers for various applications.
  • Keywords
    III-V semiconductors; aluminium compounds; electron capture; gallium compounds; high electron mobility transistors; wide band gap semiconductors; AlGaN-GaN; AlGaN-GaN high-electron mobility transistors; GaN channel layer thickness; GaN-based power amplifiers; HEMT; OFF-state breakdown voltage; RF large-signal performance; RF performance; RF small-signal performance; buffer-related current collapse; class AB operation conditions; dc performance; dc small-signal performance; deep traps; electron capture probability; pulse I-V characterization; short-channel effects; size 1 mm; size 150 nm; size 50 nm; state-of-the-art composite AlGaN-GaN buffer; Aluminum gallium nitride; Gallium nitride; HEMTs; Logic gates; MODFETs; Performance evaluation; Radio frequency; AlGaN/GaN high-electron mobility transistors (HEMTs); GaN channel layer thickness; RF power performance; current collapse; short-channel effect (SCE); short-channel effect (SCE).;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/TED.2014.2312232
  • Filename
    6782654