A microactuator for magnetic field control device with large shifting range

Author

Kun Liu ; Yitong Cao ; Huaiqiang Yu ; Zhihong Li

Author_Institution

Nat. Key Lab. of Sci. & Technol. on Micro/Nano Fabrication, Peking Univ., Beijing, China

fYear

2013

fDate

7-10 April 2013

Firstpage

528

Lastpage

531

Abstract

A large tilting angle and zero static power consumption microactuator has been designed and fabricated in order to meet the requirement of low power consumption and remotely control systems. Analytical model and fabrication process flow of rotation actuator have been demonstrated, and static performance has been tested and compared to theoretical data. The results show the performance of our electrostatic driven device in good agreement with theoretical predicted model.

Keywords

electrostatic actuators; low-power electronics; magnetic actuators; microfabrication; analytical model; electrostatic driven device; fabrication process flow; large shifting range; large tilting angle; magnetic field control device; remotely control systems; rotation actuator; theoretical predicted model; zero static power consumption microactuator; Electrostatics; Fabrication; Microactuators; Mirrors; Power demand; Voltage measurement; electrostatic driven; low power consumption; microactuator;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on

Conference_Location

Suzhou

Electronic_ISBN

978-1-4673-6351-8

Type

conf

DOI

10.1109/NEMS.2013.6559785

Filename

6559785