Title :
A microactuator for magnetic field control device with large shifting range
Author :
Kun Liu ; Yitong Cao ; Huaiqiang Yu ; Zhihong Li
Author_Institution :
Nat. Key Lab. of Sci. & Technol. on Micro/Nano Fabrication, Peking Univ., Beijing, China
Abstract :
A large tilting angle and zero static power consumption microactuator has been designed and fabricated in order to meet the requirement of low power consumption and remotely control systems. Analytical model and fabrication process flow of rotation actuator have been demonstrated, and static performance has been tested and compared to theoretical data. The results show the performance of our electrostatic driven device in good agreement with theoretical predicted model.
Keywords :
electrostatic actuators; low-power electronics; magnetic actuators; microfabrication; analytical model; electrostatic driven device; fabrication process flow; large shifting range; large tilting angle; magnetic field control device; remotely control systems; rotation actuator; theoretical predicted model; zero static power consumption microactuator; Electrostatics; Fabrication; Microactuators; Mirrors; Power demand; Voltage measurement; electrostatic driven; low power consumption; microactuator;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on
Conference_Location :
Suzhou
Electronic_ISBN :
978-1-4673-6351-8
DOI :
10.1109/NEMS.2013.6559785
