Reliability evaluation of micromirror of double S-shaped unimorph piezoelectric actuator with probabilistic approach

This paper presents the long time reliability evaluation of a micromirror with double S-shaped unimorph piezoelectric (dSUP) actuator design using a probabilistic approach. The lifetime (number of cycles to failure) of the piezoelectric actuator, electrical strength, and electrical load are considered as the random variables; and their probability distributions are discussed. The interference model of electrical load and electrical strength is used to evaluate the reliability of dSUP actuators. By this approach, the relationship between the reliability and the lifetime of the dSUP actuator has been deduced.