Title :
Research about top electrode improvement of ZnO nanowires array nanogenerator
Author :
Shaohua Wu ; Li Xiao ; Yundong Xuan ; Zhan Zhao ; Deyi Kong ; Lidong Du ; Zhen Fang
Author_Institution :
State Key Lab. of Transducer Technol., Inst. of Electron., Beijing, China
Abstract :
A novel method to fabricate the top electrode of ZnO nanogenerator is introduced in the article. Hydrothermal synthesis is adopted to grow ZnO nanowires array structure. And the sputtering process is employed as a simple fabrication method to form the top electrode. Scanning electron microscope (SEM) analysis has been carried out to identify different layers in nanogenerator. The energy harvesting experiment of the nanogenerator excited by ultrasonic wave has been complete as well in the research. Experiment results reveal that the maximum output voltage reaches about 0.23V.
Keywords :
II-VI semiconductors; energy harvesting; nanowires; scanning electron microscopy; sputter deposition; zinc compounds; ZnO; energy harvesting experiment; hydrothermal synthesis; nanowires array nanogenerator; nanowires array structure; scanning electron microscope analysis; sputtering process; top electrode improvement; ultrasonic wave; Arrays; Electrodes; Energy harvesting; Fabrication; Nanowires; Silicon; Zinc oxide; ZnO nanogenerator fabrication improvement; sputtering; top electrode;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on
Conference_Location :
Suzhou
Electronic_ISBN :
978-1-4673-6351-8
DOI :
10.1109/NEMS.2013.6559910
