Title :
Mode localization in coupled AlN/SCS cantilevers for highly sensitive resonating flow meter
Author :
Kozuka, Kazuki ; Wang, Dong ; Ikehara, T. ; Chatani, Keisuke ; Maeda, Ryutaro
Author_Institution :
Micro Eng. & Micro Syst. Lab., Ibaraki Univ., Hitachi, Japan
Abstract :
The use of vibration mode localization in arrays of mechanically-coupled, nearly identical beam-shaped resonators has been studied for ultra-sensitive mass detection and analyte identification. Our recent work (NEMS 2012) focused on enhancing the amount of amplitude change due to vibration mode localization with a beam shaped 3-resonator array. The preliminarily results were discussed from view point of vibration characteristic by comparing experimental results with analytical ones, without a small mass perturbation. The present study however try to apply the consequent amplitude change to resonating-based flow meter with a simplified system of beam shaped 2-resonator array (AlN/SCS). The possible application has been analytically discussed from view point of vibration characteristic with a small mass perturbation.
Keywords :
beams (structures); cantilevers; flow measurement; flowmeters; micromechanical resonators; vibrations; beam shaped 2-resonator array; beam shaped 3-resonator array; coupled AlN-SCS cantilevers; high-sensitive resonating flowmeter; mechanically-coupled beam-shaped resonators; resonating-based flow meter; ultrasensitive mass detection; vibration characteristic; vibration mode localization; Couplings; Fluid flow measurement; III-V semiconductor materials; Micromechanical devices; Resonant frequency; Sensors; Vibrations; Coupling overhang; Eigenstate shift (amplitude change); Mechanically-coupled resonator array; Small mass perturbation; Vibration mode localization; resonating flow meter;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on
Conference_Location :
Suzhou
Electronic_ISBN :
978-1-4673-6351-8
DOI :
10.1109/NEMS.2013.6559934
