• DocumentCode
    620667
  • Title

    Optimized gradient-free PZT thin films for micro-actuators

  • Author

    Abergel, J. ; Allain, M. ; Michaud, H. ; Cueff, M. ; Ricart, T. ; Dieppedale, C. ; Le Rhun, G. ; Faralli, D. ; Fanget, S. ; Defay, E.

  • Author_Institution
    CEA-LETI, Minatec, Grenoble, France
  • fYear
    2012
  • fDate
    7-10 Oct. 2012
  • Firstpage
    972
  • Lastpage
    974
  • Abstract
    For its outstanding piezoelectric coefficients, thin-film sol-gel Pb(Zr0.52,Ti0.48)O3 (PZT) has been widely studied over the past few decades. In particular, the impact of Zr/Ti ratio control on e31,eff coefficient has been investigated at low fields. Yet, when it comes to actuation, PZT films are used with electric fields higher than the coercive field. In this paper, the influence of Zr/Ti gradient reduction on e31,eff coefficient is investigated in actuating conditions, ie under high fields.
  • Keywords
    lead; microactuators; piezoelectric actuators; piezoelectric thin films; zirconium compounds; Pb(Zr0.52,Ti0.48)O3; coercive field; electric fields; microactuators; optimized gradient-free PZT thin films; piezoelectric coefficients; thin-film sol-gel; Acoustics; Actuators; Electric fields; Films; Silicon; Standards; Zirconium; PZT; Piezoelectricity; composition gradient;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium (IUS), 2012 IEEE International
  • Conference_Location
    Dresden
  • ISSN
    1948-5719
  • Print_ISBN
    978-1-4673-4561-3
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2012.0243
  • Filename
    6561902
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=620667