Design and test of a fully controllable 64×128 2-D CMUT array integrated with reconfigurable frontend ASICs for volumetric ultrasound imaging

Up-to-date capacitive micro-machined ultrasonic transducer (CMUT) technologies offer us the chance to shrink the size and cost of ultrasound scanners by integrating the frontend (FE) circuits into CMUT arrays. For true real-time volumetric imaging system using 2-D arrays, CMUT-on-CMOS integration techniques are promising for the development of lower cost smaller volume scanners with higher performance in terms of features and image qualities because it minimizes parasitic capacitances and ultimately improves signal-to-noise ratio (SNR). In this work we present the design and feasibility test of 2-D CMUT arrays integrated with analog front-end electronics for transmitting high voltage pulses and receiving RF echo signals.