Design of Metal MUMPs based LLC resonant converter for on-chip power supplies

In this paper, a novel Metal MUMPs based tunable LLC converter is proposed for on chip power supplies applications. The design is optimized at 20MHz resonant frequency of LLC tank network and MEMS based tunable capacitor is fabricated on the chip to tune the peak resonance frequency of circuit due to the variation of load. The Design is simulated in FEM based numerical software COMSOL and Intellisuite. From the analysis a magnetizing inductance of 14nH a leakage inductance of 48nH has been achieved from 3.6 mm2 rectangular coil transformer. The total capacitance of 1300pF has been achieved from parallel plate capacitor and variation of 3pF has been achieved from tunable capacitor. The passive components on LLC tank network have been fabricated on the same chip.