Experimental research on laser material processing used in quartz MEMS gyroscope

This paper expresses the laser material processing technology used in quartz double-H gyroscope. This processing method can be used to depress mechanical coupling and change the frequency of gyroscope. The gold masses on gyroscope chip are made by micro-electroplating method. Then, nanosecond laser with 30 ns pulse duration and femtosecond laser with 50 fs pulse duration are used to process the gold masses respectively. Surface qualities of adjustment potions are compared and analyzed. The parameters of laser system are determined. Preliminary trimming with femotsecond laser for depressing mechanical coupling is done, and the quadrature error decreases by 92%, from 1.840 V to 0.143 V. The experimental results provide a basis for depressing mechanical coupling and tuning frequency in the future work.