Title :
Rayleigh scattering measurement of residual gas inside microwave vacuum electronic devices
Author :
Hui-yu Yuan ; Chen Wu ; Feng Wang ; Ningfeng Bai ; Hehong Fan ; Pu Wei ; Xinqun Zhao ; Xiao-han Sun
Author_Institution :
Res. Center for Electron. Device & Syst. Reliability, Southeast Univ., Nanjing, China
Abstract :
We propose a method to measure the residual gas in microwave vacuum electronic devices (VED) in long-term storage based on Rayleigh scattering, and establish the relation between the gas state and the intensity of scattered light. This method can be used to monitor the status of VED in long-term storage.
Keywords :
Rayleigh scattering; microwave devices; spectrochemical analysis; vacuum microelectronics; Rayleigh scattering; gas state; long-term storage; microwave VED; microwave vacuum electronic devices; residual gas; scattered light intensity; Detectors; Educational institutions; Microwave devices; Microwave measurement; Rayleigh scattering; Windows; Rayleigh scattering; vacuum electronic devices residual gas;
Conference_Titel :
Vacuum Electronics Conference (IVEC), 2013 IEEE 14th International
Conference_Location :
Paris
Print_ISBN :
978-1-4673-5976-4
DOI :
10.1109/IVEC.2013.6571099
