RF MEMS capacitor for microwave applications

Author

Chatim, R. ; Ghahremani, Reza ; Zamudio, A. ; Sandhagen, Carl ; Bangert, Axel ; Viereck, V. ; Jaekel, Arunita ; Hillmer, Hartmut

Author_Institution

Microwave Electron. Lab., Univ. of Kassel, Kassel, Germany

fYear

2013

fDate

20-22 March 2013

Firstpage

363

Lastpage

366

Abstract

Due to miniaturization and advantages offered, RF MEMS capacitors have recently been developed for utilization in microwave circuits, i.e., wireless communication applications such as filters, matching networks, and phase shifters among others. Throughout this presented work two-plate RF MEMS capacitor networks with two different number of membranes are presented. Both are designed with the same dimension of membrane and suspension. The measurement result shows resonant frequency and capacitance of each capacitor network indicated by impedances.

Keywords

capacitors; micromechanical devices; microwave circuits; filters; matching networks; membranes; microwave applications; microwave circuits; phase shifters; resonant frequency; suspension; two-plate RF MEMS capacitor networks; wireless communication applications; Atmospheric modeling; Capacitors; Electrodes; Frequency measurement; Micromechanical devices; Radio frequency; Suspensions; RF MEMS capacitor; S-Parameter measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Information and Communication Technology (ICoICT), 2013 International Conference of

Conference_Location

Bandung

Print_ISBN

978-1-4673-4990-1

Type

conf

DOI

10.1109/ICoICT.2013.6574602

Filename

6574602