DocumentCode
628373
Title
Aluminum to Aluminum bonding at room temperature
Author
Marion, F. ; de Brugiere, B. Goubault ; Bedoin, A. ; Volpert, M. ; Berger, Frank ; Gueugnot, A. ; Anciant, R. ; Ribot, H.
Author_Institution
CEA - LETI, MINATEC, Grenoble, France
fYear
2013
fDate
28-31 May 2013
Firstpage
146
Lastpage
153
Abstract
In this work we show that high density and very low pitches face to face Aluminum/Aluminum cold bonding is feasible when using Aluminum coated micro-tubes inserted into Aluminum pads. First, mechanical simulations by FEM show that the insertion pressure felt on the top edge of the Aluminum coated micro-tube is sufficient to break native aluminum oxide present at the interface and also insure the large plastic deformation of aluminum terminations necessary for good electrical and mechanical contact at the joint. Then an electrical demonstrator with over 106 connections at a 10 μm pitch is designed, assembled and characterized: the resistance values of the Al/Al bonds prove to be similar to those obtained with Au/Al bonds. Ion Beam cross-sections associated with SEM microscopy is used to characterize the morphology of the interface and shows that seamless Al/Al interfaces can be obtained if certain conditions are fulfilled. Finally the fundamentals of the cold insertion bonding process are discussed and a relationship established with “cold roll bonding” mechanisms, it is shown that the two techniques present some similarities related to very large plastic deformations of bonded materials. This helps us to develop a bonding theory to thoroughly explain the mechanism of the Aluminum/Aluminum bonds formation during the insertion process, as well as its kinematic scenario.
Keywords
aluminium; bonding processes; cold rolling; electrical contacts; finite element analysis; ion beams; mechanical contact; pipes; plastic deformation; scanning electron microscopy; Al-Al; FEM; SEM microscopy; aluminum-aluminum cold bonding; cold insertion bonding process; cold roll bonding mechanisms; electrical contact; electrical demonstrator; insertion pressure; ion beam cross-sections; kinematic scenario; mechanical contact; mechanical simulations; microtubes; plastic deformation; plastic deformations; temperature 293 K to 298 K; Aluminum; Bonding; Finite element analysis; Force; Gold; Resistance; Strain;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Components and Technology Conference (ECTC), 2013 IEEE 63rd
Conference_Location
Las Vegas, NV
ISSN
0569-5503
Print_ISBN
978-1-4799-0233-0
Type
conf
DOI
10.1109/ECTC.2013.6575565
Filename
6575565
Link To Document