DocumentCode :
631861
Title :
A novel on-axis self-calibration approach for precision rotary metrology stages
Author :
Chuxiong Hu ; Yu Zhu ; Jinchun Hu ; Dengfeng Xu ; Ming Zhang
Author_Institution :
Dept. of Mech. Eng., Tsinghua Univ., Beijing, China
fYear :
2013
fDate :
9-12 July 2013
Firstpage :
1072
Lastpage :
1077
Abstract :
Precision rotary metrology stages need calibration technology to determine the stage error for improvement of angle measurement accuracy. In this paper, we study the calibration of precision rotary metrology stages, and present an on-axis angle self-calibration approach different from previous perspectives. Without resorting to specially designed angle comparators or added read-heads, the proposed scheme fully utilizes different measurement views of a newly designed artifact plate on the uncalibrated rotary stage. The measurement deviation of each mark line from its nominal angle position, is rigidly modeled as the combination of stage error, artifact error, misalignment error and random measurement noise. Based on the circle closure principle and mathematical definition of the axis orientation, the misalignment error of each measurement view can be directly determined by rigid algebraic processing. A least-square based calculation law is finally synthesized to determine the stage error. Computer simulation validates that the proposed method can realize the stage error accurately even there exist various random measurement noises. Finally, a practical description on how to measure the angular marks of different measurement views is provided. The proposed strategy essentially provides a novel on-axis angle self-calibration principle with accuracy, simplicity and robustness orientation to meet industrial requirements.
Keywords :
algebra; angular measurement; calibration; least squares approximations; measurement errors; angle measurement; artifact error; calibration technology; least square based calculation law; measurement deviation; misalignment error; nominal angle position; on-axis self-calibration method; precision rotary metrology stages; random measurement noise; rigid algebraic processing; stage error; Accuracy; Computational modeling;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Advanced Intelligent Mechatronics (AIM), 2013 IEEE/ASME International Conference on
Conference_Location :
Wollongong, NSW
ISSN :
2159-6247
Print_ISBN :
978-1-4673-5319-9
Type :
conf
DOI :
10.1109/AIM.2013.6584236
Filename :
6584236
Link To Document :
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