Title :
Dense CMOS-photonics integration in sub-100nm technology node
Author :
Assefa, Solomon ; Shank, S. ; Green, William M. J. ; Rylyakov, A. ; Schow, Clint ; Khater, M. ; Kamlapurkar, Swetha ; Kiewra, Edward ; Reinholm, Carol ; Vlasov, Yurii
Author_Institution :
IBM T. J. Watson Res. Center, Yorktown Heights, NY, USA
fDate :
June 30 2013-July 4 2013
Abstract :
A sub-100nm technology that allows the monolithic integration of optical devices as features into a 90nm base high-performance logic technology node is demonstrated. The technology is promising for next generation optical communications for applications.
Keywords :
CMOS integrated circuits; integrated optoelectronics; optical logic; CMOS-photonics integration; high-performance logic technology node; monolithic integration; next generation optical communications; optical devices; size 100 nm; sub-100nm technology node; Optical fiber amplifiers; Optical fiber communication; Optical filters; Optical receivers; Photonics;
Conference_Titel :
OptoElectronics and Communications Conference held jointly with 2013 International Conference on Photonics in Switching (OECC/PS), 2013 18th
Conference_Location :
Kyoto
