• DocumentCode
    63410
  • Title

    0.88-THz Optical Clock Distribution on Adhesively Bonded Silicon Nanomembrane

  • Author

    Yang Zhang ; Xiaochuan Xu ; Kwong, David ; Covey, John ; Hosseini, Amir ; Chen, Ray T.

  • Author_Institution
    Univ. of Texas at Austin, Austin, TX, USA
  • Volume
    26
  • Issue
    23
  • fYear
    2014
  • fDate
    Dec.1, 1 2014
  • Firstpage
    2376
  • Lastpage
    2379
  • Abstract
    Silicon photonics is a promising solution for on-chip optical clock distribution. We developed an adhesive bonding process to integrate silicon nanomembranes onto silicon chips. The single-mode strip waveguide fabricated on this adhesively bonded silicon membrane has a propagation loss of 4.3 dB/cm. A grating-coupled 1-to-32 H-tree optical distribution is experimentally demonstrated. Each branch includes 1.1-cm long strip waveguides, five Y-splitters, and three 90° bends. This optical distribution has a insertion loss of 13.9 dB, uniformity of 0.72 dB, and 3-dB bandwidth of 880 GHz determined by optical autocorrelation.
  • Keywords
    adhesive bonding; diffraction gratings; integrated optics; nanophotonics; optical beam splitters; optical fabrication; optical losses; optical waveguides; silicon; Si; Y-splitters; adhesive bonding process; frequency 0.88 THz; grating-coupled 1-to-32 H-tree optical distribution; insertion loss; loss 13.9 dB; on-chip optical clock distribution; optical autocorrelation; propagation loss; silicon chips; silicon nanomembrane; silicon photonics; single-mode strip waveguide; size 1.1 cm; strip waveguides; uniformity; Couplers; Gratings; Optical device fabrication; Optical fibers; Silicon; Optical clock distribution; adhesive bonding; silicon nanomembrane;
  • fLanguage
    English
  • Journal_Title
    Photonics Technology Letters, IEEE
  • Publisher
    ieee
  • ISSN
    1041-1135
  • Type

    jour

  • DOI
    10.1109/LPT.2014.2356575
  • Filename
    6895118