• DocumentCode
    638735
  • Title

    Detection of 2D and 3D distributions of magnetic field by moving a poly-Si micro Hall device

  • Author

    Kurisu, Shinpei ; Tadokoro, D. ; Matsuda, Tadamitsu ; Kimura, Mizue

  • Author_Institution
    Dept. of Electron. & Inf., Ryukoku Univ., Otsu, Japan
  • fYear
    2013
  • fDate
    2-5 July 2013
  • Firstpage
    145
  • Lastpage
    146
  • Abstract
    2D and 3D distributions of magnetic field (B) are detected by moving a poly-Si micro Hall device. First, we confirm that the Hall voltage (VH) is linearly dependent on B. Next, we move the poly-Si micro Hall device in B and measure VH. The distributions of VH are similar to those of B. Therefore, we can detect the 2D and 3D distributions of B by measuring those of VH. This predicts that we can realize a 2D area sensor by aligning poly-Si micro Hall devices in a matrix shape, and 3D spatial sensor by moving the 2D area sensor.
  • Keywords
    Hall effect transducers; elemental semiconductors; magnetic field measurement; microsensors; silicon; 2D area sensor; 2D magnetic field distribution detection; 3D magnetic field distribution detection; 3D spatial sensor; Hall voltage; Si; matrix shape; poly-Si microHall device; Area measurement; Films; Generators; Magnetic field measurement; Magnetic fields; Thin film transistors; Three-dimensional displays;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Active-Matrix Flatpanel Displays and Devices (AM-FPD), 2013 Twentieth International Workshop on
  • Conference_Location
    Kyoto
  • Type

    conf

  • Filename
    6617800
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=638735