Nonlinearity compensation for improved nanopositioning of atomic force microscope

Author

Rana, M.S. ; Pota, Hemanshu R. ; Petersen, Ian R. ; Habib, Hina

Author_Institution

Sch. of Eng. & Inf. Technol., Univ. of New South Wales (UNSW), Canberra, ACT, Australia

fYear

2013

fDate

28-30 Aug. 2013

Firstpage

461

Lastpage

466

Abstract

This article presents the design and experimental implementation of an observer-based model predictive control (OMPC) scheme with a notch filter which aims to compensate for the effects of creep, hysteresis, cross-coupling, and vibration in piezoactuators in order to improve the nanopositioning of an atomic force microscope (AFM). The controller design is based on an identified model of the piezoelectric tube scanner (PTS) for which the control scheme achieves significant compensation of its creep, hysteresis, cross-coupling, and vibration effects and ensures better tracking of the reference signal. A Kalman filter is used to obtain full-state information of the plant. The experimental results exemplify the use of this proposed control scheme.

Keywords

Kalman filters; atomic force microscopy; control system synthesis; nonlinear control systems; notch filters; observers; piezoelectric actuators; predictive control; Kalman filter; OMPC scheme; atomic force microscope nanopositioning; controller design; creep effects; cross-coupling effects; hysteresis effects; nonlinearity compensation; notch filter; observer-based model predictive control; piezoactuators; piezoelectric tube scanner; vibration efects; Creep; Electrodes; Frequency measurement; Hysteresis; Noise; Observers; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Control Applications (CCA), 2013 IEEE International Conference on

Conference_Location

Hyderabad

ISSN

1085-1992

Type

conf

DOI

10.1109/CCA.2013.6662792

Filename

6662792