Serially connected MOS terahertz sensor array

In this paper we present a coherent detector array architecture that efficiently utilizes the available chip area to enhance signal to noise ratio. For this goal the configuration can consists multiple serially connected individual detectors that are coupled to a regularly arranged antenna matrix. The solution is scalable and can be easily customized to application specific needs e.g. microscopic imaging. In the followings we present the measurement results of a fully functional prototype chip that were fabricated at 350 nm BiCMOS technology.