Thermal flow sensor integrated to PDMS-based microfluidic systems

Author

Mielli, Murilo Zubioli ; Carreno, Marcelo Nelson Paez

Author_Institution

EPUSP, LME, Univ. of Sao Paulo, Sao Paulo, Brazil

fYear

2013

fDate

2-6 Sept. 2013

Firstpage

1

Lastpage

4

Abstract

This paper presents the development of a thermal flow sensor integrated to a microchannel aiming its application in biological and chemical systems. The sensor is composed by a thin-film nickel heater deposited on a glass slice by electroplating and a microchannel fabricated on PDMS by soft lithography. Computer simulations were utilized to determine the electrical behavior of the sensor and the temperature distribution. The results show the sensor presents adequate sensibility with low interference in the fluid flow and its fabrication can be easily introduced in the standard fabrication process of PDMS-based microsystems.

Keywords

electroplating; flow measurement; glass; microchannel flow; microfabrication; microsensors; nickel; polymer films; soft lithography; temperature distribution; temperature sensors; thin film sensors; Ni; PDMS-based microfluidic system; biological system; chemical system; electroplating; fluid flow; glass slice; microchannel fabrication; soft lithography; standard fabrication process; temperature distribution; thermal flow sensor; thin film nickel heater; PDMS; flow sensor; microfluidics;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronics Technology and Devices (SBMicro), 2013 Symposium on

Conference_Location

Curitiba

Print_ISBN

978-1-4799-0516-4

Type

conf

DOI

10.1109/SBMicro.2013.6676148

Filename

6676148