Optimization of Piezoelectric Resonance Effect in a Piezoelectric Transformer Plasma Source

Optimization of the piezoelectric resonance effect in a piezoelectric transformer plasma source (PTPS) is investigated. The PTPS utilizes a piezoelectric transformer (PT) effect to generate large electric potentials and aid in plasma formation in the plasma source. Finite-element simulations are used in conjunction with observations of device operation in order to optimize the PT effect used by the plasma source. Simulations were used to determine optimal crystal rotation for electromechanical coupling and evaluate the geometry of the plasma source in order to maximize the generated voltage. Input impedance measurements and an estimate of the mechanical quality were used to verify the effectiveness of device construction changes to reduce mechanical clamping.