DocumentCode
65131
Title
Guest Editorial Special Section on the 2012 International Symposium on Semiconductor Manufacturing
Author
Koike, Hideaki
Author_Institution
Engineering Department, Toshiba Microelectronics Corporation, Image Sensor LSI Division, Image Sensor Product, Kanagawa, Japan
Volume
26
Issue
3
fYear
2013
fDate
Aug. 2013
Firstpage
314
Lastpage
314
Abstract
This special section presents extended versions of ten papers that were selected from papers presented at the 2012 International Symposium on Semiconductor Manufacturing.
Keywords
Meetings; Semiconductor device manufacture; Special issues and sections;
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.2013.2271797
Filename
6572871
Link To Document