Theory of Lamb Wave Transducers and Their Applications for Gas and Liquid Sensing

Author

Li-Feng Ge

Author_Institution

Sch. of Electr. Eng. & Autom., Anhui Univ., Hefei, China

fYear

2013

fDate

20-23 Aug. 2013

Firstpage

1714

Lastpage

1717

Abstract

Theoretical basis of Lamb wave transducers (LWT) for gas and liquid sensing is developed systematically. Two basic types of transduction mechanisms, piezoelectric and electrostatic, are discussed. A model for capacitive LWTs with second-order bending mode excitation is further developed. A design with a 100 nm thick silicon plate shows GHz resonance frequency and zg mass resolution, which is comparable with nanomechanical resonators using cantilevers and doubly clamped beams.

Keywords

bending; capacitors; elemental semiconductors; gas sensors; piezoelectric transducers; silicon; surface acoustic wave sensors; Si; cantilever; capacitive LWT; doubly clamped beam; electrostatic device; gas sensing; lamb wave transducer; liquid sensing; mass resolution; nanomechanical resonator; piezoelectric device; second-order bending mode excitation; size 100 nm; Acoustics; Liquids; Mathematical model; Resonant frequency; Sensors; Silicon; Transducers; Lamb wave transducer; gas sensing; mass resolution; model; theory;

fLanguage

English

Publisher

ieee

Conference_Titel

Green Computing and Communications (GreenCom), 2013 IEEE and Internet of Things (iThings/CPSCom), IEEE International Conference on and IEEE Cyber, Physical and Social Computing

Conference_Location

Beijing

Type

conf

DOI

10.1109/GreenCom-iThings-CPSCom.2013.315

Filename

6682327