• DocumentCode
    65445
  • Title

    IEEE Transactions on Semiconductor Manufacturing publication information

  • Volume
    26
  • Issue
    3
  • fYear
    2013
  • fDate
    Aug. 2013
  • Abstract
    Provides a listing of current staff, committee members and society officers.
  • fLanguage
    English
  • Journal_Title
    Semiconductor Manufacturing, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/TSM.2013.2275712
  • Filename
    6572907