Power electronics education using the integrated circuit consistent education system and TCAD

In this study, we perform a device evaluation from trial device production (a computer simulation) using technology CAD (TCAD) in an integrated circuit consistent education system, which consists of a series of processes: system design, semiconductor process, trial device production, and device evaluation. By changing the device parameters (kinds of material, film thickness, impurities density) of the semiconductor process, the simulation can more closely approximate the electrical property of the desired target performance. By integrating the simulation technology using TCAD with each piece of knowledge mastered by the integrated circuit consistent education system, which is currently under development, we are able to construct an education system that can be mastered not only for an integrated circuit for information processing but also for the semiconductor process and the global perspective of the device structure in a power device. Furthermore, the possibility of applicability to a new device structure and process development is shown by means of a simulation using TCAD in virtual processing conditions.