220 GHz membrane supported folded slot antenna array

Author

Bunea, Alina-Cristina ; Avram, Andrei ; Obreja, Cosmin ; Neculoiu, Dan ; Rusch, Christian

Author_Institution

Nat. Inst. of R&D in Microtechnologies (IMT), Bucharest, Romania

Volume

1

fYear

2013

fDate

14-16 Oct. 2013

Firstpage

93

Lastpage

96

Abstract

This paper presents the design, electromagnetic modeling, fabrication and characterization of a Folded Slot Antenna Array (FSAA) working at 220 GHz. The structure was processed on a 2.1 μm thick SiO₂/Si₃N₄ dielectric membrane released through deep reactive ion etching (DRIE) of low-resistivity (p = 10 Ω ·cm) silicon. The antenna was characterized on wafer, showing good agreement with simulated results. The measured calibrated gain is 5.5 dB at 220 GHz, and is greater than 0 dB between 200-250 GHz.

Keywords

membranes; millimetre wave antenna arrays; slot antenna arrays; DRIE; FSAA; deep reactive ion etching; dielectric membrane; electromagnetic modeling; frequency 200 GHz to 250 GHz; frequency 220 GHz; gain 5.5 dB; membrane supported folded slot antenna array; resistivity; silicon; Antenna arrays; Antenna measurements; Antenna radiation patterns; Arrays; Gain; Silicon; Slot antennas;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference (CAS), 2013 International

Conference_Location

Sinaia

ISSN

1545-827X

Print_ISBN

978-1-4673-5670-1

Electronic_ISBN

1545-827X

Type

conf

DOI

10.1109/SMICND.2013.6688098

Filename

6688098