DocumentCode
656945
Title
Soft-matter electronics with stencil lithography
Author
Wissman, J. ; Tong Lu ; Majidi, C.
Author_Institution
Mech. Eng. Dept., Carnegie Mellon Univ., Pittsburgh, PA, USA
fYear
2013
fDate
3-6 Nov. 2013
Firstpage
1
Lastpage
4
Abstract
We present a mask deposition technique used to create a capacitive soft-matter sensing skin. The device comprises a 6 × 6 grid of liquid Gallium-Indium alloy parallel-plate capacitors embedded in elastomer. Pressing or stretching the skin results in a measurable increase in capacitance at the affected grid points, allowing for real-time monitoring. Printer paper resists liquid metal wetting and is used as a mask during fabrication. Liquid metal is applied across the mask with an elastomer-tipped pen, selectively wetting to the elastomer substrate. With laser-cut printer paper, features as small as 250 μm are demonstrated.
Keywords
capacitive sensors; capacitors; elastomers; masks; nanolithography; wetting; capacitance; capacitive soft-matter sensing skin; elastomer substrate; elastomer-tipped pen; laser-cut printer paper; liquid gallium-indium alloy parallel plate capacitors; liquid metal wetting; mask deposition technique; real-time monitoring; soft-matter electronics; stencil lithography; Capacitance; Liquids; Lithography; Metals; Sensors; Skin;
fLanguage
English
Publisher
ieee
Conference_Titel
SENSORS, 2013 IEEE
Conference_Location
Baltimore, MD
ISSN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2013.6688217
Filename
6688217
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