Novolac-modified self-sensing piezoelectric microcantilever gas sensor

Author

Khabiry, Masoud ; Jalili, Nader ; Sirdhar, Srinivas

Author_Institution

Piezoactive Syst. Lab., Northeastern Univ., Boston, MA, USA

fYear

2013

fDate

3-6 Nov. 2013

Firstpage

1

Lastpage

4

Abstract

Development of micro- and nano- electromechanical systems (MEMS and NEMS) contributed significantly to invention of very sensitive methodologies for detection of ultrasmall masses. In this work, a novel Novolac coated piezoelectric self-sensing microcantilever system for detection of ethanol vapor was employed. By exposing two differently polymer coated microcantilevers to the ethanol vapor a downward shift of resonance frequency (33 and 28.95 kHz) was observed. The developed self-sensing strategy proved to provide a simple, inexpensive, and yet highly sensitive platform to detect chemical vapors.

Keywords

cantilevers; gas sensors; microsensors; piezoelectric transducers; MEMS; NEMS; Novolac coated piezoelectric system; ethanol vapor detection; frequency 28.95 kHz; frequency 33 kHz; microelectromechanical system; nanoelectromechanical system; piezoelectric microcantilever gas sensor; polymer coated microcantilever; resonance frequency; self-sensing microcantilever system; Chemicals; Ethanol; Frequency measurement; Polymers; Resonant frequency; Sensors; Vibrometers;

fLanguage

English

Publisher

ieee

Conference_Titel

SENSORS, 2013 IEEE

Conference_Location

Baltimore, MD

ISSN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2013.6688373

Filename

6688373