Advanced methods for calculating quadrature errors of MEMS gyroscopes

MEMS vibratory angular rate sensors use the working principle of coupling a drive vibration mode with an orthogonal sense mode via Coriolis force. The parasitic coupling between the two eigenmodes caused by fabrication tolerances is called quadrature. Former work modeled quadrature effects between drive and detection mode by only adding a coupling term in the stiffness matrix. The new method is adding an inertial coupling term to the system mass matrix. This leads to a large decrease of the calculation time in combination with a higher accuracy.