DocumentCode
657209
Title
Trends in small-format infrared array sensors
Author
Kimata, M.
Author_Institution
Coll. of Sci. & Eng., Ritsumeikan Univ., Kusatsu, Japan
fYear
2013
fDate
3-6 Nov. 2013
Firstpage
1
Lastpage
4
Abstract
MEMS-based uncooled infrared sensors are expanding into small-format areas both from high and low ends. This paper reviews the trends in small-format uncooled infrared array sensors, including the reduction of high-performance microbolometers and the development of small-format thermopile array sensors. We also discuss technologies for future growth.
Keywords
infrared detectors; microsensors; sensor arrays; thermopiles; MEMS-based uncooled infrared sensors; high-performance microbolometers; small-format thermopile array sensors; small-format uncooled infrared array sensors; Infrared sensors; Lenses; Packaging; Sensor arrays; Thermal sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
SENSORS, 2013 IEEE
Conference_Location
Baltimore, MD
ISSN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2013.6688495
Filename
6688495
Link To Document