• DocumentCode
    657209
  • Title

    Trends in small-format infrared array sensors

  • Author

    Kimata, M.

  • Author_Institution
    Coll. of Sci. & Eng., Ritsumeikan Univ., Kusatsu, Japan
  • fYear
    2013
  • fDate
    3-6 Nov. 2013
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    MEMS-based uncooled infrared sensors are expanding into small-format areas both from high and low ends. This paper reviews the trends in small-format uncooled infrared array sensors, including the reduction of high-performance microbolometers and the development of small-format thermopile array sensors. We also discuss technologies for future growth.
  • Keywords
    infrared detectors; microsensors; sensor arrays; thermopiles; MEMS-based uncooled infrared sensors; high-performance microbolometers; small-format thermopile array sensors; small-format uncooled infrared array sensors; Infrared sensors; Lenses; Packaging; Sensor arrays; Thermal sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    SENSORS, 2013 IEEE
  • Conference_Location
    Baltimore, MD
  • ISSN
    1930-0395
  • Type

    conf

  • DOI
    10.1109/ICSENS.2013.6688495
  • Filename
    6688495