DocumentCode
657359
Title
An analytical model for the optimization of toggle-based RF-MEMS varactors tuning range
Author
Sordo, Guido ; Iannacci, J. ; Solazzi, Francesco
Author_Institution
Fondazione Bruno Kessler FBK Trento, Trento, Italy
Volume
2
fYear
2013
fDate
14-16 Oct. 2013
Firstpage
263
Lastpage
266
Abstract
This paper presents an analysis of the actuation mechanism of the push-pull toggle varactor design concept for radio frequency applications, based on RF-MEMS technology. The focus of this analysis is to maximize the tuning range. In particular the influence of the dimension and the distance of the fixed electrode on the tuning range has been investigated. The results of the analytical formulation have been then compared with multi-physical simulations in order to assess the accuracy of the prediction showing promising results.
Keywords
circuit tuning; micromechanical devices; varactors; actuation mechanism; fixed electrode distance; multiphysical simulations; prediction accuracy; push-pull toggle varactor design concept; radiofrequency application; toggle-based RF-MEMS varactor tuning range; Analytical models; Bridge circuits; Capacitance; Electrodes; Micromechanical devices; Tuning; Varactors; Push-pull mechanism; RF-MEMS; Varactor;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference (CAS), 2013 International
Conference_Location
Sinaia
ISSN
1545-827X
Print_ISBN
978-1-4673-5670-1
Electronic_ISBN
1545-827X
Type
conf
DOI
10.1109/SMICND.2013.6688673
Filename
6688673
Link To Document