Low-loss low-dispersive high-resistivity silicon dielectric slab waveguide for THz region

Author

Malekabadi, S. Ali ; Boone, Francois ; Deslandes, Dominic ; Morris, Dan ; Charlebois, S.

Author_Institution

Univ. of Sherbrooke, Sherbrooke, QC, Canada

fYear

2013

fDate

2-7 June 2013

Firstpage

1

Lastpage

3

Abstract

In this paper, the performance of dielectric slab waveguides in the Terahertz (THz) frequency band is studied. High-Resistivity silicon (HR-silicon) is selected as the host material due to its high transparency in THz region. The low-cost fabrication process of the waveguide is described. Finite Element Method (FEM) based simulator (HFSS) and THz Time Domain Spectroscopy (THz-TDS) system were employed to characterize the waveguide both theoretically and experimentally. It is shown that the proposed transmission line is low-loss and low-dispersive for a wide bandwidth.

Keywords

dielectric waveguides; elemental semiconductors; finite element analysis; silicon; terahertz spectroscopy; Si; THz region; THz time domain spectroscopy system; finite element method based simulator; host material; low-cost fabrication process; low-loss low-dispersive high-resistivity silicon dielectric slab waveguide; terahertz frequency band; Dielectrics; Fabrication; Optical waveguides; Silicon; Slabs; Time-domain analysis; Dielectric Slab Waveguide; High resistivity silicon (HR-silicon); THz Time Domain Spectroscopy (THz-TDS) system; Terahertz (THz);

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest (IMS), 2013 IEEE MTT-S International

Conference_Location

Seattle, WA

ISSN

0149-645X

Print_ISBN

978-1-4673-6177-4

Type

conf

DOI

10.1109/MWSYM.2013.6697716

Filename

6697716