• DocumentCode
    670889
  • Title

    High-efficient CMOS-compatible grating couplers with backside metal mirror

  • Author

    Sfar Zaoui, Wissem ; Felix Rosa, Maria ; Vogel, Wolfgang ; Berroth, Manfred ; Butschke, Jorg ; Letzkus, Florian

  • Author_Institution
    Inst. of Electr. & Opt. Commun. Eng., Univ. of Stuttgart, Stuttgart, Germany
  • fYear
    2012
  • fDate
    16-20 Sept. 2012
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    We present a grating coupler for efficient coupling between standard fibers and photonic integrated circuits realized in a CMOS fabrication process. The method introduces a backside metal mirror to the grating coupler without need of extensive wafer bonding. The structure exhibits high coupling efficiency of -1.6 dB near the wavelength 1550 nm.
  • Keywords
    CMOS integrated circuits; diffraction gratings; integrated optoelectronics; mirrors; optical fibre couplers; optical fibre fabrication; CMOS fabrication process; backside metal mirror; coupling efficiency; high-efficient CMOS-compatible grating couplers; photonic integrated circuits; standard fibers; Couplers; Couplings; Gratings; Metals; Mirrors; Optical fibers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Communications (ECOC), 2012 38th European Conference and Exhibition on
  • Conference_Location
    Amsterdam
  • Type

    conf

  • Filename
    6706147
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=670889