Title :
High-efficient CMOS-compatible grating couplers with backside metal mirror
Author :
Sfar Zaoui, Wissem ; Felix Rosa, Maria ; Vogel, Wolfgang ; Berroth, Manfred ; Butschke, Jorg ; Letzkus, Florian
Author_Institution :
Inst. of Electr. & Opt. Commun. Eng., Univ. of Stuttgart, Stuttgart, Germany
Abstract :
We present a grating coupler for efficient coupling between standard fibers and photonic integrated circuits realized in a CMOS fabrication process. The method introduces a backside metal mirror to the grating coupler without need of extensive wafer bonding. The structure exhibits high coupling efficiency of -1.6 dB near the wavelength 1550 nm.
Keywords :
CMOS integrated circuits; diffraction gratings; integrated optoelectronics; mirrors; optical fibre couplers; optical fibre fabrication; CMOS fabrication process; backside metal mirror; coupling efficiency; high-efficient CMOS-compatible grating couplers; photonic integrated circuits; standard fibers; Couplers; Couplings; Gratings; Metals; Mirrors; Optical fibers;
Conference_Titel :
Optical Communications (ECOC), 2012 38th European Conference and Exhibition on
Conference_Location :
Amsterdam
