Parallel Conductive-AFM Lithography on LaAlO $_{3}$ /SrTiO $_{3}$ Interfaces

Nanoscale devices can be created at the LaAlO₃/SrTiO₃ interface by metastable charging of the top LaAlO₃ surface with a voltage-biased conductive-atomic force microscope (c-AFM) tip. In order to create scalable nanoelectronic circuits, it will be important to develop procedures that allow multiple tips to “write” nanostructures in parallel. Here, we demonstrate parallel writing of conductive nanostructures at the LaAlO₃/SrTiO₃ interface using an array of c-AFM tips. Independent control over the writing process for each tip is achieved by holding the tip array at a fixed potential and varying the voltage applied to individual electrodes. The approach developed here should be applicable to 2-D tip arrays with millions of probes.