DocumentCode :
671220
Title :
Growth of Multi-Walled Carbon Nanotubes on platinum
Author :
Yunusa, Z. ; Hamidon, Mohd Nizar ; Rashid, Shaufiq Abd
Author_Institution :
Inst. of Adv. Technol., Univ. Putra Malaysia, Serdang, Malaysia
fYear :
2013
fDate :
25-27 Sept. 2013
Firstpage :
363
Lastpage :
366
Abstract :
In this paper, Multi-Walled Carbon Nanotubes were grown on a surface of a substrate that consists of a quartz piezoelectric substrate with titanium under layer and platinum electrodes. The Carbon Nanotubes (CNT) was grown using thermal CVD with Iron Nitrate as the catalyst. The growth of the carbon nanotubes was carried out at a temperature of 8000C with hydrogen as the process gas and benzene as the hydrocarbon. Characterization of the as grown CNT was done using Scanning Electron Microscope (SEM) and Raman Spectroscopy. The Raman spectroscopy was carried out on a selected area of 100micron by 100 micron and the peaks of the D-band, G-band and the second order modes were observed from the Raman spectra. Image j image processing software was also used for the extraction of the diameter of the nanotube in which the average diameter was computed to be 46nm.
Keywords :
Raman spectra; carbon nanotubes; chemical vapour deposition; image processing; nanofabrication; scanning electron microscopy; C-Pt; D-band peaks; G-band peaks; Raman spectra; SEM; Scanning Electron Microscope; SiO2-Ti-Pt; benzene hydrocarbon; grown CNT; hydrogen process gas; image j image processing software; iron nitrate catalyst; multiwalled carbon nanotube growth; nanotube diameter extraction; platinum electrodes; quartz piezoelectric substrate; second order modes; substrate surface; temperature 800 degC; thermal CVD; titanium under layer; Carbon nanotubes; Electrodes; Platinum; Raman scattering; Scanning electron microscopy; Sensors; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro and Nanoelectronics (RSM), 2013 IEEE Regional Symposium on
Conference_Location :
Langkawi
Print_ISBN :
978-1-4799-1181-3
Type :
conf
DOI :
10.1109/RSM.2013.6706551
Filename :
6706551
Link To Document :
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