DocumentCode
671232
Title
Table of contents
fYear
2013
fDate
25-27 Sept. 2013
Firstpage
1
Lastpage
7
Abstract
The following topics are dealt with: MEMS; microsensors; VLSI; microwave circuits; photonics and nanotechnology.
Keywords
VLSI; micromechanical devices; microsensors; microwave integrated circuits; nanophotonics; nanotechnology; MEMS; VLSI; microsensors; microwave circuits; nanotechnology; photonics;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro and Nanoelectronics (RSM), 2013 IEEE Regional Symposium on
Conference_Location
Langkawi
Print_ISBN
978-1-4799-1181-3
Type
conf
DOI
10.1109/RSM.2013.6706564
Filename
6706564
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