On-chip microrobot for investigation of stimulant property of aquatic microorganisms

In this paper, we discuss a novel, magnetically driven microrobot equipped with a frame structure to measure the stimulant property of aquatic microorganisms. The fabricated microfluidic chip and microrobots are shown. The untethered microrobot is composed of a Si-Ni hybrid structure constructed by MEMS techniques. The microrobots with 5 μm width force sensors are actuated in a microfluidic chip by permanent magnets so that they can stimulate microorganisms with the desired force within the stable environment of the closed microchip. The unique properties of Pleurosira laevis (P. laevis) are also evaluated by using the developed on-chip microrobots.