Title :
Single-stripe tunable laser with Chirped Sampled Gratings fabricated by nanoimprint lithography
Author :
Yoshinaga, Hiroyuki ; Yanagisawa, M. ; Kaneko, Tetsuya ; Akiyama, Kazunari ; Tajima, Michio ; Shoji, Daisei ; Fujii, Teruya ; Shoji, Hajime
Author_Institution :
Sumitomo Electr. Ind., Ltd., Yokohama, Japan
Abstract :
Fabrication of diffraction gratings of Chirped Sampled Grating Distributed Reflector (CSG-DR) laser by nanoimprint lithography (NIL) has been demonstrated. The diffraction gratings with highly uniform linewidth and period have been successfully fabricated by the combination of the reverse-tone NIL and precise etching techniques. The fabricated CSG-DR laser using NIL shows sufficiently wide tuning range of 40 nm as we designed.
Keywords :
chirp modulation; diffraction gratings; distributed feedback lasers; etching; laser tuning; nanolithography; optical fabrication; semiconductor optical amplifiers; CSG-DR laser; chirped sampled grating distributed reflector laser; diffraction gratings; etching; nanoimprint lithography; reverse-tone NIL; single-stripe tunable laser; uniform linewidth; Diffraction; Diffraction gratings; Etching; Gratings; Laser tuning; Planarization; Resins;
Conference_Titel :
Microoptics Conference (MOC), 2013 18th
Conference_Location :
Tokyo
